Typical Ingot Diameter 单晶直径

200-400 mm (8-16 in)

Pull Chamber Door Opening

副室门尺寸

508 x 2,362 mm (20 x 93 in)

Throat Diameter 喉口直径

457 mm (18 in)

Seed Lift Rate 晶升速率

0-508 mm/hr

Seed Jog Speed (Nominal)

籽晶快速提升速率（最大）

508 mm/min

Total Crucible Travel 坩锅最大行程

280 mm (19.6 in )

Crucible Lift Rate 坩锅提升速率

0-254 mm/hr

Crucible Jog Speed (Nominal)

坩锅快速提升速率（最大）

50.8 mm/min

Seed Rotation (Reversible)

晶转速率（可逆）

0-35 rpm

Crucible Rotation (Reversible)

锅转速率（可逆）

0-20 rpm

Vacuum Pumps Main 主真空泵

14,200 l/min (300 cfm)

(Min. recommended) Aux 辅真空泵

1,700 l/min (50 cfm)