Performance 性能
Typical Ingot Diameter 单晶直径 |
200-400 mm (8-16 in) |
Pull Chamber Door Opening 副室门尺寸 |
508 x 2,362 mm (20 x 93 in) |
Throat Diameter 喉口直径 |
457 mm (18 in) |
Seed Lift Rate 晶升速率 |
0-508 mm/hr |
Seed Jog Speed (Nominal) 籽晶快速提升速率(最大) |
508 mm/min |
Total Crucible Travel 坩锅最大行程 |
280 mm (19.6 in ) |
Crucible Lift Rate 坩锅提升速率 |
0-254 mm/hr |
Crucible Jog Speed (Nominal) 坩锅快速提升速率(最大) |
50.8 mm/min |
Seed Rotation (Reversible) 晶转速率(可逆) |
0-35 rpm |
Crucible Rotation (Reversible) 锅转速率(可逆) |
0-20 rpm |
Vacuum Pumps Main 主真空泵 |
14,200 l/min (300 cfm) |
(Min. recommended) Aux 辅真空泵 |
1,700 l/min (50 cfm) |
